Research
Research
Seven research areas — three core thrusts plus four setup & facility areas — spanning design, fabrication, and characterization of nanoscale photonic devices.
The Nanophotonics Research Lab is engaged in interdisciplinary research focused on optical phenomena at the nanoscale, semiconductor device physics, and the development of novel nanotechnology.
Areas
Research thrusts.
Three interconnected research directions in nanoscale photonics, low-dimensional optical nanomaterials, and optoelectronic nanodevices.
Nanoscale Photonics & Plasmonics
Sub-wavelength nanophotonic structures, plasmonic resonators, and integrated photonic circuits.
Read 02 / AreaLow-dim Optical Nanomaterials
Two-dimensional semiconductors and quantum-confined materials for photonic applications.
Read 03 / AreaOptoelectronic Nanodevices
Electrically driven nanowire and microdisk light sources, micro-LEDs, and photodetectors.
ReadInfrastructure
Setup & Facility.
In-house instruments and compute resources supporting end-to-end work from device design to characterization.
Fabrication Facility
In-house process line: SEM, photolithography, RIE, e-beam evaporator, critical-point dryer.
Read 05 / FacilityOptical Characterization
Visible and near-infrared optical setups, butt-coupling with lensed fibers.
Read 06 / FacilityNumerical Simulation
Cluster-node FDTD/FEM simulation of nanophotonic devices.
Read 07 / FacilitySample Preparation
Ultra-clean sample prep, exfoliation, and pre-fabrication processing.
ReadFabrication
Scanning Electron Microscope
SEM
Field-emission scanning electron microscope for high-resolution imaging of nanoscale devices and structures.
Photolithography System
Photo · UV exposure
UV mask aligner / exposure system for micro-scale pattern definition on photoresist.
Reactive-Ion Etching
RIE · dry etch
Plasma-based dry etching for anisotropic pattern transfer into dielectric and semiconductor films.
E-beam Evaporator
E-beam · metal deposition
Electron-beam evaporation system for thin-film metal deposition, used for contacts, masks, and plasmonic layers.
Critical Point Dryer
CPD · supercritical CO₂
Supercritical CO₂ critical-point dryer for stiction-free drying of suspended micro/nanostructures.
Setup & Facility
Optical Microscope
OM
Standard optical microscope (OM) for sample inspection and alignment.
Transfer Stage
PDMS micro-tip transfer
Transfer stage for PDMS micro-tip — composed of an optical microscope, damping plate, and XYZ stage.
NIR Setup
Near-infrared optics
Optical measurement setup for light in the near-infrared wavelength range.
Visible Setup
Visible-band optics
Optical measurement setup for light in the visible wavelength range.
Simulation
Cluster Nodes
Simulation cluster
Cluster of compute nodes for full-wave optical simulation of nanophotonic devices.